MEMS (micro-electromechanical systems) switches are miniature mechanical switches fabricated using micro/nano processing technologies. The core is a tiny movable cantilever beam structure. Electrostatic or other driving forces control the mechanical movement of the cantilever beam to turn signal terminals on or off. By application field, they are mainly divided into RF MEMS switches and MEMS relays.

• Supports TSV/TGV wafer-level packaging
• Enables on-chip integration
• Can be fabricated on glass, quartz, high-resistivity silicon and other substrates

• RF front-end modules
• Wireless communication
• Automated testing
• Smart grids