MEMS Devices | Flexible Electrodes, AFM Probes, PMUT & Microfluidics

Flexible Electrodes

Flexible electrodes combine MEMS fabrication with conductive flexible substrates for wearable devices, sensors and bioelectronic interfaces.

Product Features

• Flexible: can be bent, stretched and twisted for conformal use on curved or moving surfaces.
• Lightweight: suitable for portable, wearable and compact electronic devices.
• High conductivity: supports multiple conductive material options for efficient signal and current transmission.
• Good biocompatibility: suitable material systems can support safe and effective bio-interface applications.

Typical Applications

• Wearable devices
• Brain-computer interfaces
• Sensors
• Flexible electronics

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Probes

MEMS probes support high-density electrical testing and precision contact applications for semiconductor and device-level measurement.

Product Features

• Tip radius can reach the 10-nanometer scale. The micro-cantilever length and thickness are strictly calibrated to support high-sensitivity sample scanning.
• The process introduces advanced dry etching beyond traditional wet etching, enabling more precise control of tip sharpness and geometry and improving probe resolution and consistency.

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Two-Dimensional Materials

Two-dimensional materials such as graphene, boron nitride, molybdenum disulfide and MXene support research in sensors, electronics and advanced MEMS devices.

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PMUT

PMUT devices convert electrical and acoustic energy through piezoelectric thin films for ultrasonic sensing, ranging and interaction applications.

Product Features

• Compact size and low power consumption
• High integration capability
• Strong environmental adaptability
• Excellent device performance

Typical Applications

• Time-of-flight (ToF) distance sensing
• Ultrasonic fingerprint recognition
• Human-machine interaction

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MEMS Switches

MEMS switches use micro-mechanical movable structures to control signal paths and are used in RF front ends, testing systems and smart-grid applications.

Product Features

• Supports TSV/TGV wafer-level packaging
• Enables on-chip integration
• Can be fabricated on glass, quartz, high-resistivity silicon and other substrates

Typical Applications

• RF front-end modules
• Wireless communication
• Automated testing
• Smart grids

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Silicon Nitride Membrane Windows

Semicon Global Tech supplies and develops MEMS device-related products including flexible electrodes, probes, two-dimensional materials, PMUT devices, MEMS switches, silicon nitride membrane windows and microfluidic chips. These products are designed for research, device prototyping and application verification in sensing, biomedical, RF and microfluidic systems.

Customization Types

silicon nitride
Semicon Global Tech supplies and develops MEMS device-related products including flexible electrodes, probes, two-dimensional materials, PMUT devices, MEMS switches, silicon nitride membrane windows and microfluidic chips. These products are designed for research, device prototyping and application verification in sensing, biomedical, RF and microfluidic systems.

Customized service
Semicon Global Tech supplies and develops MEMS device-related products including flexible electrodes, probes, two-dimensional materials, PMUT devices, MEMS switches, silicon nitride membrane windows and microfluidic chips. These products are designed for research, device prototyping and application verification in sensing, biomedical, RF and microfluidic systems.

chips
Semicon Global Tech supplies and develops MEMS device-related products including flexible electrodes, probes, two-dimensional materials, PMUT devices, MEMS switches, silicon nitride membrane windows and microfluidic chips. These products are designed for research, device prototyping and application verification in sensing, biomedical, RF and microfluidic systems.

chips
Semicon Global Tech supplies and develops MEMS device-related products including flexible electrodes, probes, two-dimensional materials, PMUT devices, MEMS switches, silicon nitride membrane windows and microfluidic chips. These products are designed for research, device prototyping and application verification in sensing, biomedical, RF and microfluidic systems.

Typical Applications

Silicon nitride membrane windows provide thin, stable support films for TEM observation, biological samples, EDX/EELS analysis and in-situ heating chips.

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Microfluidics

Microfluidic chips use microchannels and bonded material layers to manipulate small-volume fluids for biomedical, chemical and sensing applications.

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