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Doping
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MEMS processing
Doping
Doping Overview
Doping introduces a controlled amount and type of impurities into silicon to obtain a precise impurity distribution. It is used to modify wafer electrical properties and form vertical device and circuit structures. Common approaches include diffusion and ion implantation. High-temperature diffusion drives impurities through the silicon crystal structure, while ion implantation injects impurities into a silicon wafer through high-energy ion bombardment and atomic-level collisions. Semicon Global Tech supports ion implantation, diffusion, annealing and related semiconductor doping processes.
Doping
Metal-Organic Chemical Vapor Deposition GaN,GaAs
Chemical Vapor Deposition SIC
Ion Implantation B,P,F,Al,N,Ar,H,He,Si
High-Temperature Oxidation
High-Temperature Diffusion / Annealing
Rapid Thermal Annealing
Case Studies
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