Silicon Wafers | Semiconductor Substrates for MEMS Fabrication

Silicon Wafers

Silicon Wafer

Silicon Wafer Overview

Silicon wafers generally refer to thin slices cut from single-crystal silicon. Common wafer diameters include 2 inch, 3 inch, 4 inch, 6 inch and 8 inch, mainly used for integrated circuit manufacturing. A silicon wafer is the raw material, while the chip is the finished product. Silicon wafers are key materials for integrated circuits; through photolithography, ion implantation and other processes, they can be fabricated into various semiconductor devices.

Silicon Wafer Specifications

This page introduces related technologies, materials and application information for MEMS and semiconductor projects.

Inch	Diameter / mm	Polished Side	Doping	Crystal Orientation	Resistivity / Ω·cm	Thickness / μm
2inch	50.8±0.5	Double-Side Polished	P/N	100	120	200-500
2inch	50.8±0.5	Single-Side Polished	P/N	100	120	200-500
3inch	76	Double-Side Polished	P/B	100	NA	525±20
3inch	76	Single-Side Polished	P/B	100	NA	525±20
4inch	100±0.2	Double-Side Polished	P/N	100	0.001-10	200-2000
	100±0.3	Single-Side Polished
	100±0.4
6inch	150±0.3	Double-Side Polished	P/N	100	110	500-650
6inch	150±0.3	Single-Side Polished	P/N	100	110	500-650
8inch	200±0.3	Double-Side Polished	P/N	100	0.1-20	625
8inch	200±0.3	Single-Side Polished	P/N	100	0.1-20	625

Case Studies