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Core Technology in Semiconductor Micro/Nano Fabrication: Magnetron Sputtering Innovation and Applications
Published:2025-09-18
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Thin-film deposition creates functional layers on wafers and substrates, making it a key step in MEMS, semiconductor and optical component manufacturing.

Common deposition methods include PVD, CVD, PECVD, LPCVD, ALD, magnetron sputtering and electron-beam evaporation. Each method has different advantages in film density, uniformity, step coverage, stress control and material compatibility.

Typical deposited films include metals, oxides, nitrides, optical films and composite films. Film thickness, adhesion, surface quality and within-wafer uniformity directly influence device performance.

For practical projects, deposition should be matched with subsequent lithography, etching, bonding and packaging steps. Early process evaluation helps reduce delamination, stress mismatch and yield loss.

Semicon Global Tech provides thin-film deposition and related micro/nano fabrication services for customized R&D and production requirements.

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