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AMAT Radiance/Radiance Plus Parts

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AMAT Radiance/Radiance Plus Parts
Product Overview
Replacement RTP parts for AMAT Radiance and Radiance Plus equipment, including reflectors, gold sleeve, cylinders and edge ring.
Available Parts
The following product information is provided for reference to help identify compatible replacement parts.
Part Number(PN)Description
0041-27029REFLECTOR
0041-12192REFLECTOR
0041-12156REFLECTOR
0021-01419GOLD SLEEVE
0200-17147CYLINDER (BLACK QUARTZ)
0200-15617CYLINDER (SILICON-COATED QUARTZ)
0200-23002EDGE RING
Product Images
AMAT Radiance/Radiance Plus Parts
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