Etching Parts
LAM Kiyo CX
Injector, TCP window, chamber, liner and liner-door replacement parts.
Learn MoreProcess Equipment
Etching and Process Parts
The existing Parts portfolio is now organized in one category covering etching, PVD, RTP, EPI, diffusion and related process-equipment components. Original product-detail URLs are retained.
Etching Parts
LAM Kiyo FX
Injector, window, top chamber, chamber liner and liner-door parts.
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Etching Parts
AMAT Sym3
Chamber and gas-delivery parts including hub, lid, injector and liners.
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Etching Parts
TEL RK6+/RK7
Exhaust plate, shield ring, window, shutter and deposition shield.
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RTP Parts
AMAT Radiance / Radiance Plus
Reflectors, gold sleeve, cylinders and edge-ring replacement parts.
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Diffusion Parts
6-inch SiC Wafer Boat
SiC wafer boat for high-temperature semiconductor diffusion applications.
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Other Parts
Other Process Parts
Additional domes, nozzles, chambers and process-equipment parts.
Learn MoreEquipment and platform names are used only to identify product compatibility. All trademarks remain the property of their respective owners.
Custom Engineering
Need a wheel matched to your equipment?
Send us your drawing, target load, travel speed and clean-room requirements. Our team will review the specification and recommend a suitable construction.
