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LAM Kiyo FX Parts

Semiconductor Materials

LAM Kiyo FX Parts
Product Overview
Replacement parts for LAM Kiyo FX etching equipment, including injector, windows, top chamber, chamber liner, liner and liner door.
Available Parts
The following product information is provided for reference to help identify compatible replacement parts.
Part Number(PN)Description
716-057993-335INJECTOR
719-003481-861WINDOW
715-059638-603TOP CHAMBER
715-042721-866CHAMBER LINER
715-042721-885LINER
715-045710-821LINER DOOR
Product Images
LAM Kiyo FX Parts
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