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Home
MEMS Foundry Services
Lithography
Etching
Thin-Film Deposition
Wafer Bonding
Doping
Dicing
Micro Drilling
Wafer Thinning
Polishing
Electroplating
Semiconductor Materials
Silicon Wafers
Glass Wafers
Quartz Wafers
PI Films
SOI Wafers
Photomasks
Photoresists
Parts
MEMS Devices
Flexible Electrodes
Probes
Two-Dimensional Materials
PMUT
MEMS Switches
Silicon Nitride Membrane Windows
Microfluidics
About Us
Company Profile
Our Team
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LAM Kiyo GX Parts
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LAM Kiyo GX Parts
Product Overview
Replacement parts for LAM Kiyo GX etching equipment, including PTK5 window, injector, liners, pinnacle and liner door.
Available Parts
The following product information is provided for reference to help identify compatible replacement parts.
Part Number(PN)
Description
719-003481-385
WINDOW (PTK5)
716-057993-335
INJECTOR
715-042721-853
LINER (PTK5)
715-059638-607
PINNACLE (PTK5)
715-224025-217
LINER
715-045710-016
LINER DOOR
Product Images
MEMS Foundry Services
Lithography
Etching
Thin-Film Deposition
Wafer Bonding
Doping
Dicing
Micro Drilling
Wafer Thinning
Polishing
Electroplating
Semiconductor Materials
Silicon Wafers
Glass Wafers
Quartz Wafers
PI Films
SOI Wafers
Photomasks
Photoresists
Parts
MEMS Devices
Flexible Electrodes
Probes
Two-Dimensional Materials
PMUT
MEMS Switches
Silicon Nitride Membrane Windows
Microfluidics
About Us
Company Profile
Our Team
News & Insights
Company News
Contact Us
Contact Information
Online Inquiry
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