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LAM Kiyo GX Parts

Semiconductor Materials

LAM Kiyo GX Parts
Product Overview
Replacement parts for LAM Kiyo GX etching equipment, including PTK5 window, injector, liners, pinnacle and liner door.
Available Parts
The following product information is provided for reference to help identify compatible replacement parts.
Part Number(PN)Description
719-003481-385WINDOW (PTK5)
716-057993-335INJECTOR
715-042721-853LINER (PTK5)
715-059638-607PINNACLE (PTK5)
715-224025-217LINER
715-045710-016LINER DOOR
Product Images
LAM Kiyo GX Parts
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