LAM Syndion C/FS/GS Parts
Product Overview
Replacement rings, showerhead windows and lift pins for LAM Syndion C/FS/GS etching equipment.
Available Parts
The following product information is provided for reference to help identify compatible replacement parts.
| Part Number(PN) | Description |
|---|
| 716-027904-006 | RING, CENTERING, 2300BSR |
| 716-022495-847 | RING, EDGE, 2300 BSR |
| 716-022493-905 | RING, SHADOW, BTM, 300MM |
| 716-104870-823 | WDO, SHWRHD, BTM, .008GSKT |
| 716-104870-113 | WDO, SHWRHD, TOP, .008GSKT |
| 716-022498-001 | PIN, LIFT, BSR, 2300 |
